Lam Research 810-800081-018 | P2 VME Backplane PCB | Legacy Tool Support

  • Model: 810-800081-018
  • Manufacturer: Lam Research
  • Board Identification: P2 MB VME Etch PCB
  • Internal Reference: PCB-I-E-350
  • Revision Reference: Rev. B
  • Core Function: VME motherboard/backplane used within legacy Lam Research etch equipment
  • Type: VME backplane / motherboard PCB
  • Application: Legacy semiconductor etch equipment
  • Condition: Legacy/obsolete equipment spare; availability and condition vary by board
Category: SKU: Lam 810-800081-018

Description

Lam Research 810-800081-018 | P2 MB VME Etch PCB | Legacy Semiconductor Equipment Board

 

Key Technical Specifications

Parameter Specification
Manufacturer Lam Research
Part Number 810-800081-018
Board Type P2 MB / VME motherboard or backplane PCB
Equipment Function Etch-system internal VME interconnection
Architecture VME-based
Board Revision Rev. B reported in field records
PCB Reference PCB-I-E-350
Application Lam Research semiconductor processing equipment
Standalone Operation No — system-level board
Replacement Basis Exact part number and revision should be matched

Important: Publicly available documentation for this Lam Research internal PCB is limited. Electrical ratings, connector assignments, slot count, bus loading, and mechanical dimensions should be taken from the equipment drawing or the actual board rather than copied from generic reseller listings.

 

Product Introduction

The Lam Research 810-800081-018 is identified in field inventories as a P2 MB VME Etch PCB, with Rev. B references and the internal PCB designation PCB-I-E-350. It belongs to the VME-based control architecture used in legacy Lam Research semiconductor etch equipment.

This is a system-level interconnection board rather than a conventional PLC input/output module. Its suitability depends heavily on the host tool, VME architecture, board revision, installed processor and peripheral cards, and the cabinet wiring associated with the original system.

810-800081-018

Application Scenarios & Field Pitfalls — Engineer’s Perspective

Engineering Pain Point

Legacy VME-based semiconductor tools can become difficult to maintain when the original motherboard or backplane develops intermittent bus faults, connector degradation, or damaged traces. A visually similar VME PCB is not automatically an acceptable substitute because the backplane wiring and slot assignment are part of the equipment architecture.

Typical Applications

  • Lam Research etch equipment using the corresponding P2 VME architecture.
  • Legacy VME control systems where 810-800081-018 is specified by the equipment documentation.
  • Board-level maintenance involving replacement of a damaged P2 motherboard/backplane.
  • Spare-parts stocking for older semiconductor production tools where system downtime is costly.

Technical Pitfalls to Avoid

  1. Do not treat it as a generic VME backplane.
    The designation “P2 MB VME ETCH” indicates an equipment-specific assembly. Slot wiring, auxiliary signals, termination, and connector assignments may differ from a generic VME chassis.
  2. Match the board revision.
    Rev. B is specifically reported for 810-800081-018. Compare the silkscreen, revision marking, connector population, and PCB identification before approving a replacement.
  3. Do not rely on generic electrical specifications from reseller pages.
    Some listings describe this part as a generic industrial control module with Modbus and digital I/O, but those claims conflict with the much more specific VME Etch PCB identification.
  4. Verify the complete tool configuration.
    The related 810-800081 family includes other P2 MB/VME boards, including 810-800081-015 and 810-800081-022. Similar numbering does not establish interchangeability.

 

Related Products

  • Lam Research 810-800081-015 — Another P2 MB VME motherboard associated with Lam Research etch equipment; revision and system compatibility must be checked separately.
  • Lam Research 810-800081-022 — VME backplane PCB in the same general equipment family; not automatically interchangeable with 810-800081-018.
  • Lam Research 810-800081-013 — P2 MB VME PCB; potentially related by architecture, but exact tool and revision matching is required.
  • Lam Research 810-800082-029 — VME breakout PCB associated with the same general VME equipment environment.
  • Lam Research 810-017034-005 — VME 68030 processor board used in other legacy Lam Research control architectures; it should not be treated as the same function as the P2 motherboard.
  • Lam Research 810-802902-019 — Node 2 motherboard associated with a different Lam Research process-module architecture.
  • Lam Research 810-800086-010 — DC controller assembly PCB; functionally different from the VME motherboard.

 

Procurement Check

For a replacement 810-800081-018, I would record at least:

  • Exact P/N: 810-800081-018
  • PCB identification: PCB-I-E-350
  • Board revision, especially Rev. B
  • Host Lam Research tool model
  • VME chassis/backplane configuration
  • Connector and slot population
  • Processor and peripheral board combination
  • Physical condition of VME connectors and solder joints
  • Evidence of previous repair or component replacement
  • Functional test against the target equipment, where practical

The safest procurement description is “Lam Research 810-800081-018 P2 MB VME Etch PCB, PCB-I-E-350, Rev. B” rather than simply “industrial control module.”