Description
Key Technical Specifications
| Parameter | Specification |
|---|---|
| Manufacturer | LAM Research |
| Model | 685-069171-100 |
| Product designation | OES2 Sync Spectrometer, Endpoint |
| Product type | Optical Emission Spectroscopy (OES) spectrometer |
| Primary function | Plasma emission measurement and etch endpoint detection |
| Measurement principle | Optical emission spectroscopy |
| Process application | Semiconductor plasma processing |
| Optical wavelength range | Not verified for this part number |
| Spectral resolution | Not verified |
| Electrical supply | Not verified |
| Communication interface | OEM interface; exact connection not verified |
| Mounting arrangement | Verify against the original equipment assembly |
| Operating temperature | Not verified |
| Hardware revision | -100 |
| OEM compatibility | Must be confirmed against the equipment configuration |
The part designation is supported by equipment inventory and shipping descriptions identifying it as an OES2 synchronized spectrometer for endpoint measurement. Published technical specifications from unrelated or unverified listings should not be treated as confirmed OEM values.
685-069171-100
Product Introduction
LAM Research 685-069171-100 OES2 Spectrometer
The LAM Research 685-069171-100 is an OES2 synchronized spectrometer assembly used for optical emission measurement and endpoint monitoring in semiconductor processing equipment. Optical emission spectroscopy analyzes light generated by plasma during processing. Changes in emission intensity can provide process information that helps the equipment control system identify an endpoint condition and manage recipe transitions.
The -100 part number is specifically identified as an OES2 synchronized endpoint spectrometer. Its exact optical range, electrical connections, firmware requirements, and equipment-specific configuration should be confirmed using the original assembly label and tool documentation before replacement.
Application Scenarios & Field Pitfalls
Typical application scenarios
- Plasma etch endpoint detection: Monitors optical emission changes associated with material removal and process endpoint conditions.
- Semiconductor process monitoring: Provides optical measurement data for evaluating plasma behavior during wafer processing.
- Synchronized OES measurement: Supports coordinated spectrometer acquisition and endpoint measurement within the equipment’s process-control sequence.
- Legacy tool maintenance: Serves as a replacement spare for compatible LAM Research equipment using the OES2 measurement architecture.
Field pitfalls and verification points
- Part-number distinction: Do not confuse
685-069171-100with685-069171-002. Both are identified with endpoint spectrometer functions, but interchangeability is not established. - Optical alignment: Inspect the optical path and associated cable connections. Contamination, damaged fiber ends, or incorrect routing can reduce signal quality.
- Synchronization: Confirm that the replacement supports the installed tool’s OES synchronization and endpoint measurement configuration.
- Software compatibility: Verify the equipment software revision and spectrometer configuration before commissioning. A physically compatible assembly may still fail to initialize correctly.
- Endpoint calibration: Compare baseline spectra and endpoint traces after installation. Do not assume that an existing recipe will produce identical measurement behavior without verification.
- Electrical connections: Confirm connector pinout, supply requirements, and grounding from the original equipment documentation. Do not apply assumed 24 VDC power specifications.
Related Products
- 685-069171-002 — spectrometer endpoint variant; verify revision and configuration differences before substitution.
- 684-802260-017 — optical cable, associated with the spectrometer system.
- 685-064724-001 — OES-related spectrometer assembly identified as an OES and control unit.
- 685-064724-002 — Related OES and control assembly variant; not established as a direct replacement.
- 685-A00670-001 — OES3 electronic module; a different OES generation and not a direct substitute without system-level compatibility confirmation.
Procurement and replacement note: Before ordering, compare the complete part number, revision, connector layout, optical connections, and equipment serial-number compatibility. Request photographs of the identification label and connector side, plus any available test record showing spectrometer communication and endpoint measurement operation. The exact electrical and optical specifications remain unverified, so they should not be inferred from the general product description.
