JDSU 2213-75TSLKTB | 75mW Argon Laser for SP1 DLS

  • Model: 2213-75TSLKTB
  • Brand: JDSU
  • Series: 2010/2213 Argon Ion Laser System
  • Core Function: Generates the optical illumination used by compatible semiconductor inspection and metrology equipment.
  • Product Type: Argon Ion Laser Head / Laser Assembly
  • Key Specs: 75 mW nominal class; air-cooled argon-ion architecture; Model 2213 laser head
  • Application: KLA-Tencor SP1 DLS and related wafer-inspection equipment.
Category: SKU: JDSU 2213-75TSLKTB

Description

Product Overview

The JDSU 2213-75TSLKTB is an argon-ion laser head associated with the JDSU 2213 laser system and semiconductor inspection equipment. Available equipment references identify the part as a 75 mW argon laser, with the TSLKTB configuration specifically associated with KLA-Tencor inspection platforms. One equipment-service reference lists it for AIT 2, AIT 3, and AIT XP systems, while another identifies the part as being used on SP1 DLS systems.

The optical source is the important part of this assembly. The broader JDSU 2010-series architecture uses a Model 2213 head, a 2313 argon-ion laser tube, and a 2113 power supply. The laser head is therefore not an ordinary electrical control module and should not be evaluated using PLC/DCS replacement criteria. In semiconductor inspection equipment, its optical output and alignment directly affect the measurement system’s ability to detect surface particles and defects. The exact optical condition matters more than a simple power-on test.

For JDSU 2213-75TSLKTB, procurement should include the complete part number and the target inspection-system model. A secondary equipment reference gives 2213-75SLTA as an alternate part number, but I would verify that substitution against the actual equipment configuration before installation. Laser age, tube operating hours, output power, polarization/alignment hardware, and whether the unit is new, retubed, or refurbished can materially change replacement risk.

 

Product Introduction

A semiconductor inspection system can remain electrically operational while its laser source has degraded enough to compromise measurement quality. JDSU 2213-75TSLKTB is a 75 mW-class argon-ion laser head designed for specialized inspection equipment rather than general-purpose industrial control.

The Model 2213 architecture uses a dedicated laser head, laser tube, and power supply. For a KLA-Tencor legacy laser replacement, optical output, tube condition, alignment, and installation hardware should be checked together.

 

Key Technical Specifications

Parameter Value
Manufacturer JDSU
Model 2213-75TSLKTB
Product Type Argon Ion Laser Head
Laser Family JDSU 2010 Series / Model 2213
Laser Medium Argon ion
Nominal Output 75 mW
Cooling Air-cooled
Laser Head Model 2213
Laser Tube 2313 family reported
Associated Power Supply 2113 family reported
Primary Equipment KLA-Tencor semiconductor inspection systems
Reported Compatible Systems SP1 DLS, AIT 2, AIT 3, AIT XP
Alternate Part Number 2213-75SLTA reported
Installation Hardware Polarization/alignment rings may be supplied depending on configuration
Condition New Surplus / New or Retubed configurations require verification

The 75 mW rating, Model 2213 head, 2313 tube, 2113 power-supply architecture, and semiconductor-inspection applications are supported by available equipment references.

Technical caution: I would not publish a specific wavelength, beam diameter, tube current, operating voltage, or output-power tolerance for this exact suffix without the applicable JDSU specification sheet. Some online descriptions incorrectly identify the unit as a fiber-laser or optical-test module, which does not match the more specific references identifying it as a 75 mW argon-ion laser head.

2213-75TSLKTB

Related Products

  • JDSU 2213-75SLTA — Reported alternate part number for the 75 mW argon laser configuration. Verify mechanical and optical compatibility before substitution.
  • JDSU 2213 — Model 2213 argon-ion laser head platform. The 75 mW suffix identifies a particular output configuration.
  • JDSU 2313 — Argon-ion laser tube associated with the Model 2213 system. It is the optical generating element rather than the complete laser head.
  • JDSU 2113 — Associated power supply for the Model 2213 argon-ion laser system. It supplies the laser head/tube assembly and is not an optical replacement.
  • JDSU 2114B-30SLT — Related argon-ion laser configuration used on other semiconductor inspection platforms. Its 30 mW class output makes it unsuitable as a direct 75 mW replacement without system-level qualification.
  • JDSU 1103P-0613 — Laser tube assembly referenced for KLA-Tencor equipment. It represents a different replacement approach from a complete 2213 laser-head assembly.
  • Melles Griot 05-LPM-911-065 — Related laser power-supply hardware used in semiconductor/metrology equipment. It is not a direct replacement for the JDSU 2213 laser head.

 

Frequently Asked Questions

What is JDSU 2213-75TSLKTB used for?

The 2213-75TSLKTB is a 75 mW argon-ion laser head used as an optical source in specialized semiconductor inspection equipment. References specifically associate it with KLA-Tencor SP1 DLS, AIT 2, AIT 3, and AIT XP systems.

It is not a PLC, DCS module, or general-purpose optical network transceiver.

Is 2213-75TSLKTB a 75 mW laser?

Yes. Multiple equipment references identify the configuration as a 75 mW argon laser.

That rating should not be confused with measured output from an aging or retubed unit. Actual optical output needs to be tested.

What equipment uses JDSU 2213-75TSLKTB?

Reported applications include:

  • KLA-Tencor SP1 DLS
  • KLA-Tencor AIT 2
  • KLA-Tencor AIT 3
  • KLA-Tencor AIT XP

For replacement procurement, match the target equipment model and optical assembly configuration rather than relying only on the laser part number.

Is 2213-75SLTA an alternative to 2213-75TSLKTB?

One equipment reference explicitly lists 2213-75SLTA as an alternate part number.

That does not automatically establish interchangeability. Before using it, compare:

  1. Laser head dimensions.
  2. Mounting/alignment rings.
  3. Optical axis.
  4. Electrical connections.
  5. Output specification.
  6. Target inspection-system model.
  7. Calibration requirements.

Can I replace the laser while the inspection system is powered?

No.

This is a laser source connected to dedicated power hardware and optical alignment components. Replacement should be performed with the laser system powered down and isolated according to the equipment manufacturer’s service procedure.

After installation, optical alignment and output verification may be required.

Does a New Surplus 2213-75TSLKTB mean the laser tube is unused?

Not necessarily unless the seller provides traceable documentation.

For this type of laser assembly, ask for:

  • Manufacturing date.
  • Tube operating hours, if available.
  • Original versus retubed status.
  • Output-power test result.
  • Ignition/startup test.
  • Alignment condition.
  • Polarization-ring status.
  • Serial number.
  • Test date.

A unit described only as “new surplus” should not automatically be assumed to have a new laser tube.

How should I test a 2213-75TSLKTB before shipment?

A meaningful test should go beyond checking whether the laser starts.

Recommended procedure:

  • Verify exact part number and serial number.
  • Inspect the laser head and optical window.
  • Check mounting/alignment rings.
  • Confirm electrical connectors.
  • Perform controlled startup using the appropriate power supply.
  • Verify ignition stability.
  • Measure optical output.
  • Check output stability over a controlled operating period.
  • Inspect beam/alignment characteristics where suitable instrumentation is available.
  • Record tube/output test data.
  • Provide the test report with the unit.

To be completely transparent, the public documentation for 2213-75TSLKTB is inconsistent. Some listings call it a laser scanner or optical analyzer, while more specific equipment references identify it as a 75 mW JDSU argon-ion laser used with semiconductor inspection systems. For procurement, I would rely on the physical nameplate, target equipment compatibility, optical test results, and laser operating history rather than generic catalog descriptions.