Description
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Item description
| Parameter item | Specification |
|---|---|
| Brand / Manufacturer | AMAT Applied Materials (AKT) |
| Model / Part Number | 0100-71443 |
| Product type | Chamber Distribution 55K CVD Board |
| Product Description | The key power distribution control board used in the chemical vapor deposition (CVD) chamber is responsible for managing the distribution of high voltage and current, ensuring process stability. |
| origin | USA |
| Power handling capacity | 55 kV |
| Input voltage | 12 ~ 24 VDC |
| Output voltage | 12 ~ 24 VDC |
| Output current | 500 mA |
| Output configuration | Multiple output channels (Multiple Output Channels) |
| Operating temperature range | -40°C ~ +85°C |
| Cooling method | Active Cooling |
| Installation method | Specific Chamber Installation |
| Safety protection | Overcurrent、Overvoltage |
| Dimensions (Length × Width × Height) | 135 × 186 × 119 mm |
| Weight | 1.0 ~ 1.2 kg |
| Application fields | Semiconductor manufacturing, CVD deposition process, PVD system, display panel manufacturing |
| Compatible equipment | Applied Materials CVD / PVD |
| Product status | NEW |
| Warranty period | 12 months |
| Shipping port | Xiamen |
Product Features
- Precise high-voltage power distribution for CVD process chamber, supports 55kV power processing, stabilizes voltage & current output to guarantee uniform thin-film deposition.
- Integrated overvoltage, overcurrent & short-circuit protection, effectively prevent high-voltage failures and protect key chamber components.
- Industrial wide temperature range (-40℃ ~ +85℃), excellent anti-vibration and anti-EMI performance, suitable for cleanroom vacuum manufacturing environment.
- Modular embedded design for dedicated chamber installation, easy to maintain and replace; equipped with active cooling for long-term continuous operation.
- Stable power timing control ensures repeatable process conditions, improves production yield for mass manufacturing.
- Native compatibility with AMAT AKT PECVD system control protocol, seamless plug-and-play replacement.
0100-71443
Application Fields
- Flat Panel Display Manufacturing
Compatible with AMAT AKT 55KS PECVD systems, used for LCD, OLED, Mini LED, Metal Oxide TFT panel production for SiNx & SiO₂ dielectric film deposition.
- Semiconductor Wafer Fabrication
PECVD thin-film deposition process on silicon wafers, vacuum cluster processing equipment.
- Photovoltaic & Glass Coating Industry
Passivation film and optical film deposition on large-area glass substrates.
- General Vacuum Equipment
Plasma processing tools and vacuum coating equipment chamber power control system.
