Description
Key Technical Specifications
| Parameter | Specification |
|---|---|
| Product Model | 0190-72680 |
| Manufacturer | Applied Materials (AMAT) |
| Identified Sensor | MKS 728A-26593 |
| Product Type | Vacuum Pressure Transducer |
| Pressure Range | 10 Torr |
| Application | Semiconductor vacuum/process equipment |
| Primary Function | Vacuum pressure measurement |
| Equipment Association | Applied Materials process equipment |
| Sensor Technology | MKS 728A-series pressure measurement technology |
| Installation | Tool/chamber vacuum measurement circuit |
| Condition | Verify New Surplus / Refurbished status before purchase |
The strongest available part-number evidence associates 0190-72680 specifically with an MKS 728A-26593, 10 Torr configuration. Other online descriptions conflict, calling the same number a controller or chamber-interface component, so it would be unsafe to treat every published specification as authoritative.
Application Scenarios & Pain Points
A vacuum sensor failure can stop an otherwise healthy process tool. The frustrating part is that the failure may initially look like a chamber, valve, pump, or control problem rather than a measurement-device problem.
- Semiconductor vacuum processing: Used for monitoring chamber or vacuum-line pressure where accurate pressure feedback is required for process control.
- Etch and deposition equipment: Applicable where vacuum pressure is part of the recipe-control loop. The exact tool compatibility should be confirmed from the installed component identification.
- AMAT legacy equipment maintenance: A candidate replacement when the original component is identified as AMAT 0190-72680 and the installed sensor matches the MKS 728A-26593 / 10 Torr configuration.
- Emergency spare inventory: Useful as a controlled spare for facilities supporting older semiconductor equipment, provided the calibration condition and physical interface are documented.
Field note: If a replacement sensor suddenly reports a plausible but incorrect pressure, do not assume the sensor is good because the reading is stable. Check the pressure range, electrical connection, calibration state, and controller scaling first. A clean-looking connector does not prove calibration integrity.
0190-72680
Related Products
- MKS 728A-26593 — The strongest identified counterpart for 0190-72680, specifically referenced as a 10 Torr configuration. This is the first part to compare when validating interchangeability.
- AMAT 1350-01133 — Listed as an MKS 852B12PCJ2GC Baratron pressure transducer. It belongs to the same general vacuum-measurement field but is not automatically interchangeable with 0190-72680.
- AMAT 3870-01212 — Identified as a Nor-Cal isolation valve. It complements pressure measurement within a vacuum system but performs a mechanical isolation function rather than pressure sensing.
- INFICON PCG550 — A separate vacuum-gauge family used for pressure measurement. Its electrical and pressure-range characteristics must be checked before considering it as an alternative.
- MKS 728 Series — The broader MKS 728 pressure-transducer family. Different full model numbers can have different pressure ranges and interfaces, so “728 Series” alone is insufficient for a replacement decision.
- AMAT 0190-72679 — Reported by one equipment-parts source as an earlier related RF-control component; however, the available evidence does not establish it as a direct replacement for 0190-72680. Treat this as a reference only, not a drop-in substitute.
The Engineer’s Guide: Field Pitfalls to Avoid
⚠️ Do not purchase by “0190-72680” alone if the application is critical.
Verify the physical label and, ideally, photograph the connector and identification markings. The available online descriptions are inconsistent, while one source specifically identifies the number as an MKS 728A-26593 10 Torr unit.
⚠️ Pressure range mismatch can create a false sense of normal operation.
A sensor with a different full-scale range may produce readings that look reasonable but do not correspond correctly to the equipment controller’s expected scaling. Confirm the 10 Torr configuration before commissioning.
⚠️ Calibration condition matters.
For vacuum measurement hardware, “powers on” is a weak acceptance criterion. Ask whether the unit has been tested for pressure response and whether calibration information is available.
Practical check: Before removing the existing sensor, record its part number, pressure range, connector orientation, controller input scaling, and baseline reading at a known vacuum condition. Keep that information with the replacement unit’s test record.
Frequently Asked Questions (FAQ)
Is Applied Materials 0190-72680 a vacuum pressure sensor?
Available part references identify 0190-72680 as an MKS 728A-26593 10 Torr pressure transducer associated with Applied Materials equipment. Some other product listings describe the number differently, so the physical nameplate should be treated as the final identification point.
What pressure range does 0190-72680 use?
The strongest matching reference specifies a 10 Torr configuration. Do not substitute another MKS 728-series transducer merely because it has the same family designation; the pressure range and interface must match.
Can I replace 0190-72680 with another MKS 728-series sensor?
Not without checking the complete model number. The 728 family contains configurations with different measurement ranges and characteristics. Compare the installed sensor’s full identification, pressure range, connector, output requirements, and tool configuration before installation.
How can I verify an 0190-72680 is authentic?
For a critical spare, request clear photographs of the original nameplate, serial information, connector assembly, and any manufacturer markings. Then compare those details with the installed component and available equipment documentation. A generic label showing only “0190-72680” is not enough for high-value semiconductor equipment.
What should be tested on a refurbished 0190-72680?
At minimum:
- Physical connector and housing condition
- Correct 10 Torr configuration
- Electrical output
- Pressure response
- Zero/baseline behavior
- Calibration status
- Tool-side controller compatibility
For production equipment, a documented test result is preferable to a simple power-up confirmation.
Is 0190-72680 suitable for every Applied Materials vacuum tool?
No. An AMAT part number does not automatically mean universal tool compatibility. The actual chamber platform, sensor interface, controller configuration, pressure range, and installed revision need to be checked before ordering.
