Description
JDS Uniphase 2213-75SLCSJ Argon Laser Head
Product Overview
The 2213-75SLCSJ is an air-cooled argon-ion laser head manufactured by JDS Uniphase, designed for precision optical measurement and inspection systems. This single-line 488nm laser delivers stable continuous-wave blue light output, widely paired with ADE CR-80 / CR-81 surface metrology controllers in semiconductor wafer inspection and precision metrology equipment.
Key Technical Specifications
- Laser Type: Air-cooled Argon-ion laser
- Wavelength: 488 nm single line
- Rated Output Power: 75 mW @ 9A operating current
- Package: Cylindrical sealed housing, built-in vibration isolation
- Cooling Method: Forced air cooling
- Optical Noise: ≤0.1% RMS
- Compatible Controller: ADE CR-80, ADE CR-81
- Application Environment: Controlled cleanroom environment
2213-75SLCSJ
Core Features
- Excellent beam stability and low optical noise, critical for high-precision surface scanning and thickness measurement.
- Integrated vibration damping structure to minimize beam drift caused by equipment vibration.
- Air-cooled design eliminates complex water cooling pipelines, reducing system integration complexity.
- Compact cylindrical construction, easy mounting and alignment within optical benches.
- Long service life and consistent output characteristics, suitable for continuous 24/7 operation in metrology stations.
Typical Applications
Semiconductor wafer surface profiling, thin film thickness measurement, optical microscopy, precision non-contact surface inspection, ADE surface metrology system retrofit and spare part replacement.
Installation & Maintenance Notes
- Operate only in dust-free cleanroom environments to protect optical window and internal cavity.
- Avoid mechanical shock during handling; internal plasma tube is fragile.
- Regular filter cleaning is required to maintain airflow and prevent overheating.
- This is a high-precision optical spare part, commonly stocked as replacement laser head for aging metrology systems.
