Description
Product Overview
The Applied Materials 0010-44213 is identified as a pyrometer used in semiconductor rapid thermal processing equipment. A pyrometer measures temperature through emitted thermal radiation rather than direct physical contact with the target. In an RTP system, this type of measurement supports monitoring of the wafer’s thermal condition during process cycles, where temperature control can influence film properties, material behavior, and process repeatability.
The part number appears in an Applied Materials RTP spare-parts list under the description ISSG Pyrometer. Separate equipment inventory records associate it with 300 mm Radiance RTP systems. These references support its identification as a thermal measurement component, but they do not establish a complete compatibility matrix across all RTP platforms or chamber configurations.
For maintenance teams, the Applied Materials 0010-44213 should be treated as a precision sensing component rather than a generic temperature probe. Its performance depends on the correct optical configuration, mounting position, sensing path, and equipment-side interface. Contamination, scratches, misalignment, or damage to the probe and cable can affect measurement quality. A replacement that physically fits may still be unsuitable if its optical characteristics or calibration requirements differ from the installed version.
Before purchasing an Applied Materials 0010-44213, compare the removed component’s label, assembly details, cable arrangement, connector, and tool configuration. Confirm the applicable service procedure and calibration requirements. Publicly available references do not provide verified measurement range, wavelength, accuracy, electrical interface, or probe dimensions for this exact part number. Those values should not be inferred from other pyrometer models.
Product Introduction (Non-Templated)
RTP temperature measurement is a process-control issue, not simply a sensor replacement task. If the optical path is contaminated or the replacement probe has a different sensing configuration, the reported temperature may not represent the actual wafer condition. That can affect process qualification and recipe consistency.
The 0010-44213 is listed as an ISSG Pyrometer for Applied Materials RTP equipment. During incoming inspection, pay particular attention to the probe tip, cable condition, connector, and any visible signs of handling damage. Confirm calibration and tool compatibility before returning the chamber to production.
Key Technical Specifications
| Parameter | Value |
|---|---|
| Product Model | 0010-44213 |
| Manufacturer | Applied Materials |
| Product Type | Pyrometer |
| Equipment Category | Rapid Thermal Processing (RTP) |
| Inventory Description | ISSG Pyrometer |
| Measurement Principle | Optical / infrared radiation measurement |
| Primary Function | Non-contact temperature monitoring |
| Associated Platform | Applied Materials RTP; 300 mm Radiance association reported |
| Probe Diameter | Not verified for this exact part number |
| Optical Wavelength | Not verified |
| Measurement Range | Not verified |
| Measurement Accuracy | Not verified |
| Output Interface | Not verified |
| Supply Voltage | Not verified |
| Cable Configuration | Verify against the original assembly |
| Mounting Arrangement | Tool-specific; not verified |
| Calibration Requirement | Confirm with the applicable equipment procedure |
| Operating Temperature | Not verified |
The pyrometer identification is supported by an RTP parts list. The remaining unverified values should be checked against the original component label and applicable service documentation.
0010-44213
Related Products
These part numbers appear in the broader Applied Materials RTP thermal-measurement and chamber-spares inventory. They are not confirmed direct substitutes for 0010-44213.
- 0010-23715 — Radiance+ 2 mm pyrometer probe for 300 mm RTP, identified for P8.
- 0010-23716 — Radiance+ 2 mm pyrometer probe for 300 mm RTP, identified for Plus P1–P7.
- 0010-44968 — ISSG emissometer.
- 0190-32002 — Vulcan emissometer T8.
- 0190-32004 — Vulcan pyrometer.
- 0190-32514 — RTP probe.
- 0040-88855 — 300 mm Centura lamp housing.
Frequently Asked Questions
Q1: What is the Applied Materials 0010-44213 used for?
It is identified as an ISSG pyrometer in an Applied Materials RTP spare-parts list. Its function is associated with optical temperature measurement in thermal-processing equipment.
Q2: Is the 0010-44213 compatible with all Applied Materials RTP systems?
No universal compatibility is verified. Confirm the tool model, chamber configuration, installed assembly, and service documentation before ordering.
Q3: Is this a contact or non-contact temperature sensor?
It is identified as a pyrometer, which uses thermal radiation for non-contact temperature measurement. The exact optical configuration of this part number remains unverified.
Q4: Can I hot-swap the 0010-44213?
Do not assume hot-swap capability. Follow the equipment-specific shutdown, isolation, and handling procedures before disconnecting or replacing the sensor assembly.
Q5: Does the 0010-44213 support firmware v3.1?
A firmware version or v3.1 compatibility statement has not been verified. Confirm the host tool’s software configuration and sensor interface requirements in the applicable service documentation.
Q6: What should I inspect before accepting a used pyrometer?
Inspect the probe tip for scratches, deposits, or deformation. Check the cable for cuts, kinks, and damaged insulation, and inspect the connector for bent or contaminated contacts. Request functional test results and calibration information where applicable.
Q7: Can 0010-23715 or 0010-23716 replace 0010-44213?
They should not be treated as direct replacements. The parts list describes them as Radiance+ pyrometer probes, while 0010-44213 is listed as an ISSG Pyrometer. Confirm the optical and mechanical configuration with the equipment documentation before substitution.
Procurement note: The most specific identification available is Applied Materials 0010-44213 — ISSG Pyrometer for RTP equipment. Some secondary listings describe it inconsistently, so verify the original part label and tool configuration before relying on broader claims about platform compatibility or probe specifications.
