Description
Key Technical Specifications
The following specifications are documented for the MKS Series 979B family. They are useful for identifying the instrument, but the exact flange and communication configuration of part number 979B-01-0013 still needs confirmation.
| Parameter | Series 979B documentation |
|---|---|
| Manufacturer | MKS Instruments |
| Product Series | 979B |
| Product Type | Atmosphere-to-vacuum transducer |
| Sensor Technology | MEMS MicroPirani and Bayard-Alpert hot cathode |
| Measurement Range | 5 × 10⁻¹⁰ Torr to atmosphere |
| Setpoint Range | 5 × 10⁻¹⁰ to 100 Torr |
| Calibration Gas | Nitrogen |
| Digital Communication | RS-232 / RS-485 |
| Analog Output | 0.5–7 VDC, 0.5 V per decade |
| Relay Outputs | 3 SPST relays |
| Relay Contact Rating | 1 A at 30 VAC/DC, resistive load |
| Supply | 24 VDC, 15 W |
| Operating Temperature | 0–40°C |
| Maximum Bakeout Temperature | 85°C |
| Overpressure Limit | 1,500 Torr |
| Installation Orientation | Any |
| Typical Weight | 422 g with KF25 flange |
Important model distinction: The Series 979B OEM documentation specifies a hot-cathode ionization sensor combined with a MicroPirani sensor. Some reseller descriptions incorrectly identify the instrument as a cold-cathode gauge or a Baratron capacitance manometer. Those descriptions should not be used as the basis for replacement selection.
Product Introduction
The MKS Instruments 979B-01-0013 belongs to the Series 979B wide-range vacuum measurement family. Its combined MicroPirani and hot-cathode sensing arrangement supports pressure monitoring from atmospheric conditions into the ultra-high-vacuum range. This allows one instrument to monitor different stages of a vacuum process without requiring separate gauges for each pressure region.
The transducer supports analog and digital integration, with configurable setpoints and filament-control functions. It is suitable for vacuum equipment where pressure feedback, pump-down monitoring, and process interlocks depend on reliable measurement across a broad pressure range.
979B-01-0013
Application Scenarios & Field Pitfalls
Typical applications
- Semiconductor vacuum processing: Monitors chamber pressure during pump-down and process transitions in semiconductor manufacturing equipment.
- Thin-film deposition: Provides pressure feedback for vacuum coating and deposition systems.
- Analytical instruments: Supports vacuum monitoring in scientific and analytical equipment.
- High-vacuum systems: Tracks pressure across roughing, high-vacuum, and ultra-high-vacuum operating stages.
Field checks before replacement
- Verify the flange. Series 979B documentation lists 1⅓-inch CF, 2¾-inch CF, NW16 KF, NW25 KF, and NW40 KF configurations. The correct connection must match the chamber port.
- Match the communication interface. RS-232 and RS-485 versions have different wiring and configuration requirements.
- Check the analog output scale. The documented output is 0.5–7 VDC at 0.5 V per decade. Confirm the receiving controller’s scaling before connecting it.
- Verify the power supply. The Series 979B documentation specifies 24 VDC and 15 W. Confirm supply capacity and connector pin assignments.
- Protect the sensor during installation. Particulate contamination can affect sensor operation. MKS documentation recommends suitable inlet filtration for installations exposed to harsh environments.
- Respect filament operating limits. Do not activate hot-cathode filament power above 5 × 10⁻² Torr. Excessive pressure can damage the filament.
- Follow high-voltage precautions. Disconnect power before removing the hot-cathode electronics or performing sensor service.
Related Products and Components
- 979B-11 / 979B-12 – Series 979B configurations with 1⅓-inch CF flange; RS-232 and RS-485 versions, respectively.
- 979B-21 / 979B-22 – 2¾-inch CF configurations with different communication interfaces.
- 979B-31 / 979B-32 – NW16 KF configurations.
- 979B-41 / 979B-42 – NW25 KF configurations.
- 979B-51 / 979B-52 – NW40 KF configurations.
- PDR900-11-US – Single-channel vacuum display/controller with RS-232/RS-485 support.
- 100013620 – RS-232 cable for connecting a 979B transducer to a PDR900 controller.
- 100013671 – RS-485 cable for the same controller family.
These are documented Series 979B configurations and accessories. They are not proof that every item is compatible with the specific 979B-01-0013 assembly.
Procurement and Replacement Notes
The Series 979B is listed as an obsolete product by at least one vacuum-equipment supplier. Confirm current OEM service and replacement availability before planning a long-term installation.
CCR Process Products
Before purchasing 979B-01-0013, request:
- Photograph of the complete product label and serial number
- Vacuum flange type and size
- RS-232 or RS-485 interface identification
- Connector and pinout photographs
- Analog output and relay configuration
- Calibration or pressure-response test documentation
- Hot-cathode filament condition and operating history
Replacement recommendation: Match the complete part number, flange, communication interface, and electrical pinout. A Series 979B unit with a different flange or communication suffix should not be assumed to be a direct replacement.
