Description
The designation 65040-PACV-AYU2 refers to a specialized industrial product manufactured by VAT Vakuumventile AG (rather than Triconex).
Key Overview & Specifications
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Product Type: Series 650 Pendulum Control & Isolation Gate Valve
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Brand: VAT
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Function: Designed for high-vacuum and ultra-high-vacuum (UHV) applications, combining both pressure/flow control (throttling) and reliable isolation sealing in a single compact valve unit.
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Common Applications: Semiconductor manufacturing, flat-panel display production, thin-film coating systems, and research environments requiring precise vacuum chamber pressure regulation.
65040-PACV-AYU2
Product Overview
65040-PACV-AYU2 is a VAT Series 650 Pendulum Control & Isolation Throttle Valve manufactured by VAT (Switzerland), an integrated vacuum pendulum valve with built-in closed-loop pressure control electronics.
This unit combines vacuum isolation function and high-precision pressure throttling. It receives setpoint commands from upper control systems, automatically adjusts the pendulum plate opening to regulate chamber conductance, stabilizes vacuum pressure inside process chambers. It integrates position encoder, stepper drive and adaptive pressure PID algorithm, widely used in semiconductor thin-film processes.
Technical Specifications
| Item | Parameter |
|---|---|
| Part Number | 65040-PACV-AYU2 |
| Module Type | DN100 Pendulum Pressure Control & Isolation Vacuum Valve |
| Manufacturer | VAT Vakuumventile AG |
| Nominal Diameter | DN100 (4 inch) |
| Valve Actuation | Stepper motor positioning; pneumatic lift for sealing ring tight closure |
| Control Principle | Built-in adaptive PID pressure closed-loop control |
| Pressure Working Range | 1×10⁻⁸ mbar ~ atmospheric pressure |
| Leak Rate | <1×10⁻⁹ mbar·l/s (closed state) |
| Communication Options | RS485 / Analog 4–20mA setpoint & feedback |
| Position Feedback | High-resolution encoder |
| Material | Hard-anodized aluminum body, low-particle sealing materials |
| Operating Temperature | -20 ℃ ~ +120 ℃ (derate at high temperature) |
| Ambient Humidity | 5%–95% non-condensing |
| Application Medium | Dry process vacuum (N₂, process gases) |
| Core Functions | Vacuum isolation valve shutoff + continuous pressure throttling control |
| Commissioning Tool | VAT dedicated service software / handheld service box |
| Spare Part Status | OEM production discontinued; surplus new & refurbished assemblies available |
Key Features
- All-in-one design: mechanical valve body + actuator + pressure controller integrated, no external separate throttle amplifier
- Adaptive PID algorithm, automatic learning mode for fast stable pressure regulation, minimal overshoot
- Dual function: can be used as isolation valve for chamber vent/pump switch, as well as continuous pressure control valve
- Low particle pendulum movement structure, meets strict cleanliness requirements for semiconductor wafer processing
- Supports remote pressure setpoint via analog signal or digital bus, easy integration with wafer processing equipment controllers
- Built-in comprehensive self-diagnosis, detects motor overload, position sensor fault and communication abnormality
- The suffix AYU2 defines electrical wiring and firmware version; cannot be directly interchanged with other suffix variants without re-calibration
- Important note: many suppliers mistakenly classify it as “PLC module”; this is a complete vacuum valve assembly, not a standalone circuit board
Application Scope
300mm semiconductor wafer CVD/ALD deposition equipment, thin-film coating vacuum systems, industrial vacuum test platforms, solar cell manufacturing vacuum process equipment, and maintenance & retrofit projects of legacy VAT 650 series vacuum processing equipment.
